Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

被引：70

作者：

Luginbuhl, P ^{[1
]}

Collins, SD ^{[1
]}

Racine, GA ^{[1
]}

Gretillat, MA ^{[1
]}

deRooij, NF ^{[1
]}

Brooks, KG ^{[1
]}

Setter, N ^{[1
]}

机构：

[1] SWISS FED INST TECHNOL, LAB CERAM MX D ECUBLENS, EPFL, CH-1015 LAUSANNE, SWITZERLAND

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1997年 / 6卷 / 04期

关键词：

flexural-plate waves; Lamb wave acoustic transducers; PZT sol-gel thin film; micropump; microtransport;

D O I：

10.1109/84.650131

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned on a thin-film composite membrane of silicon nitride, platinum, and a sol-gel-derived piezoelectric ceramic (PZT) thin film, The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid delivery systems. Improved acoustic signals and improved mass transport are achieved with PZT over present Lamb wave devices utilizing ZnO or AlN as the piezoelectric transducer.

引用

页码：337 / 346

页数：10

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