Antimony oxide thin films from the atmospheric pressure chemical vapour deposition reaction of antimony pentachloride and ethyl acetate

被引：24

作者：

Binions, Russell ^{[1
]}

Carmalt, Claire J. ^{[1
]}

Parkin, Ivan P. ^{[1
]}

机构：

[1] UCL, Christopher Ingold Labs, Dept Chem, London WC1H 0AJ, England

来源：

POLYHEDRON | 2006年 / 25卷 / 15期

关键词：

APCVD; antimony oxide; gas sensor;

D O I：

10.1016/j.poly.2006.05.006

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

The reaction of antimony pentachloride and ethyl acetate under atmospheric pressure chemical vapour deposition conditions leads to the production of antimony (III) oxide thin films on glass and gas sensor substrates. Scanning electron microscopy (SEM) indicated that an island growth mechanism predominated. X-ray photoelectron spectroscopy (XPS) revealed binding energy shifts of 20.6 eV for O 2s and 35.4 eV for Sb 4d. The films were X-ray amorphous. Energy dispersive X-ray analysis (EDXA) and electron probe microanalysis (EPMA) gave coherent elemental compositions indicating that single phase Sb2O3 was made, with negligible impurity levels. The films showed little optical reflectance (similar to 10%) and 65-75% total transmission from 400 to 800 nm. Gas sensing experiments indicated that the films responded best to a reducing gas at 400 degrees C. (C) 2006 Elsevier Ltd. All rights reserved.

引用

页码：3032 / 3038

页数：7

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