Photochemical attachment of reactive cross-linked polymer films to Si/SiO2 surfaces and subsequent polymer brush growth

被引:20
作者
Beinhoff, Matthias
Frommer, Jane
Carter, Kenneth R.
机构
[1] Univ Massachusetts, Conte Ctr Polymer Res, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
[2] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA
关键词
D O I
10.1021/cm0600733
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thin films consisting of a mixture of acrylate/methacrylate monomers were photochemically attached to modified silicon wafer surfaces. Reactive functionality was embedded into the photopolymer film by adding alkoxyamine monomers (inimers) that facilitate polymer brush growth in subsequent polymerization reactions. We present a careful examination of each of the steps, from substrate preparation to silane coupling agent coating, photopolymer attachment, and polymer brush growth. Several 3-methacryloxypropyl silanes were evaluated as silane coupling reagents. The surface roughness of wafers increased from 0.2 to 0.6 nm after treatment with silane. Curing of a thin photopolymer film did not increase the surface roughness. Interestingly, brushes of d(8) polystyrene grown from the photopolymer surface displayed half the roughness of the underlying polymer layer, displaying a smoothing effect. All photopolymer films attached to the wafers utilizing a silane layer had excellent adhesion. We studied the film surfaces by water contact angle measurements, atomic force microscopy, and IR and X-ray photoelectron spectroscopies.
引用
收藏
页码:3425 / 3431
页数:7
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