High temperature conductivity studies on nanoscale yttria-doped zirconia thin films and size effects

被引:90
作者
Karthikeyan, Annamalai [1 ]
Chang, Chia-Lin [1 ]
Ramanathan, Shriram [1 ]
机构
[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
关键词
D O I
10.1063/1.2385211
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of 9.5% yttria-doped zirconia in the range of 17-210 nm thickness were deposited on MgO (100) substrates by electron beam evaporation. The conductivity of the films was found to increase as the film thickness decreased. The films were found to be a mixture of both cubic and tetragonal phases. The impedance and electrical modulus parameters indicate that the relaxation process is due to ionic conduction. Enhancements in conductivity are attributed to the space charge effects that occur at the interface and grain boundaries as evidenced by the high activation energy observed in the conductivity relaxation process. (c) 2006 American Institute of Physics.
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页数:3
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