Quantitative measurement of linear dielectric constant using scanning nonlinear dielectric microscopy with electro-conductive cantilever

被引:16
作者
Ohara, K [1 ]
Cho, Y [1 ]
机构
[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 7B期
关键词
scanning nonlinear dielectric microscopy; quantitative measurement; linear dielectric constant;
D O I
10.1143/JJAP.41.4961
中图分类号
O59 [应用物理学];
学科分类号
摘要
A quantitative measurement method of the linear dielectric constant using cantilever-type scanning nonlinear dielectric microscopy (SNDM) is reported. Using this method, we succeed in quantitatively measuring the linear dielectric constant distribution of TiO2-Bi2Ti4O11 ceramics with higher resolution than that obtained with needle-type SNDM.
引用
收藏
页码:4961 / 4964
页数:4
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