A new method of increasing numerical aperture of microlens for biophotonic MEMS

被引：17

作者：

Jeong, KH ^{[1
]}

Lee, LP ^{[1
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Dept Bioengn, Berkeley, CA 94720 USA

来源：

2ND ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS | 2002年

关键词：

microlens; numerical aperture control; focal length control;

D O I：

10.1109/MMB.2002.1002350

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

A novel method for increasing numerical aperture of microlens for biophotonic applications is presented in this paper. It is based on the control of UV curable polymer lenslet volume and surface energy of substrates.. The volume control of polymer lenslets for tuning the focal length is accomplished on the substrates with different surface energies by a microdispensing method. Microlens with high numerical aperture is fabricated on the control layer of a hydrophobic polymer deposited on the cover substrate of a microfluidic chip. Microlenses with different numerical apertures have been designed and characterized. The high numerical aperture microlens integrated on a microfluidic chip will allow high-resolution and high signal to noise detection in biophotonic MEMS applications.

引用

页码：380 / 383

页数：4

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