Analysis and control of surface degenerated layers grown on thin Pb(Zr, Ti)O-3 films

被引：21

作者：

Fujisaki, Y

Torii, K

Hiratani, M

KushidaAbdelghafar, K

机构：

[1] Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185

来源：

APPLIED SURFACE SCIENCE | 1997年 / 108卷 / 03期

关键词：

XPS; PZT; surface degradation; decomposition; nitric acid; ferroelectric;

D O I：

10.1016/S0169-4332(96)00607-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Chemical states and structures of thin degenerated layers grown on the surface of PZT(Pb(Zr, Ti)O-3) films are investigated by X-ray photo-electron spectroscopy (XPS) and RHEED (reflection of high energy electron diffraction). A careful study of the Ti 2p peak in the XPS spectrum reveals that PZT films easily absorb moisture from the air and decompose into their component oxides. This creates a degenerated layer that can be removed by the nitric acid treatment. After this treatment, the PZT surface becomes more resistant to humidity than the original surface.

引用

页码：365 / 369

页数：5

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