Migration-enhanced epitaxy (MEE) growth of five-layer asymmetric coupled quantum well (FACQW) and its cross-sectional STM observation

被引:3
作者
Noh, JH
Hasegawa, S
Suzuki, T
Arakawa, T
Tada, K
Asahi, H
机构
[1] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan
[2] Yokohama Natl Univ, Dept Elect & Comp Engn, Grad Sch Engn, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan
[3] Kanazawa Inst Technol, Dept Syst Intellectual Creat, Grad Sch Engn, Minato Ku, Tokyo 1050002, Japan
关键词
five-layer asymmetric coupled quantum well (FACQW); optical modulator; migration-enhanced epitaxy (MEE); cross-sectional scanning tunneling microscopy (STM);
D O I
10.1016/j.physe.2004.02.011
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The five-layer asymmetric coupled quantum well (FACQW) is a new potential-tailored quantum well that is promising for ultra-fast and ultra-low-voltage optical modulators and switches. FACQW samples were grown by the migration-enhanced epitaxy (MEE) and the conventional molecular beam epitaxy methods with steep and flat heterointerfaces in the monolayer accuracy. They were characterized with the cross-sectional scanning tunneling microscopy (STM). In the cross-sectional STM image, double-stripe structures with different contrast were observed. The stripe area corresponds to the FACQW (about 10 nm wide), sandwiched with the AlGaAs barrier layers (15 nm wide). A dark line observed at the middle of the FACQW stripe area corresponds to the 3-monolayer-thick AlAs layer. The cross-sectional STM images of the high-quality heterointerface FACQW structures were successfully observed for the samples grown by the MEE method. More detailed studies of this kind of cross-sectional STM observations will be very effective to obtain the optimized growth conditions for fine and complicated ultra-thin structures. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:482 / 486
页数:5
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