Hybrid surface roughening modes during low-temperature heteroepitaxy:: Growth of fully-strained metastable Ge1-xSnx alloys on Ge(001)2x1

被引:14
作者
Desjardins, P
Spila, T
Gürdal, O
Taylor, N
Greene, JE
机构
[1] Univ Illinois, Dept Mat Sci, Coordinated Sci Lab, Urbana, IL 61801 USA
[2] Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA
来源
PHYSICAL REVIEW B | 1999年 / 60卷 / 23期
关键词
D O I
10.1103/PhysRevB.60.15993
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Fully-strained single-crystal metastable Ge1-xSnx alloys were grown on Ge(001) up to their critical epitaxial thickness values t(epi)(x) in order to probe surface roughening pathways leading to heteroepitaxial breakdown during low-temperature molecular-beam epitaxy under large compressive strain. All films with x > 0.09 have comparable roughnesses while films with x < 0.09 are considerably tougher with larger lateral feature sizes. Roughening rates increase with increasing x for films with x > 0.09,due to a new hybrid relaxation path which only becomes accessible under high strain as kinetic roughening provides surface oscillations on lateral length scales that allow bulk relaxation through strain-induced islanding at growth temperatures where it could not otherwise proceed. [S0163-1829(99)01247-3].
引用
收藏
页码:15993 / 15998
页数:6
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