Hybrid surface roughening modes during low-temperature heteroepitaxy:: Growth of fully-strained metastable Ge1-xSnx alloys on Ge(001)2x1

被引:14
作者
Desjardins, P
Spila, T
Gürdal, O
Taylor, N
Greene, JE
机构
[1] Univ Illinois, Dept Mat Sci, Coordinated Sci Lab, Urbana, IL 61801 USA
[2] Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA
来源
PHYSICAL REVIEW B | 1999年 / 60卷 / 23期
关键词
D O I
10.1103/PhysRevB.60.15993
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Fully-strained single-crystal metastable Ge1-xSnx alloys were grown on Ge(001) up to their critical epitaxial thickness values t(epi)(x) in order to probe surface roughening pathways leading to heteroepitaxial breakdown during low-temperature molecular-beam epitaxy under large compressive strain. All films with x > 0.09 have comparable roughnesses while films with x < 0.09 are considerably tougher with larger lateral feature sizes. Roughening rates increase with increasing x for films with x > 0.09,due to a new hybrid relaxation path which only becomes accessible under high strain as kinetic roughening provides surface oscillations on lateral length scales that allow bulk relaxation through strain-induced islanding at growth temperatures where it could not otherwise proceed. [S0163-1829(99)01247-3].
引用
收藏
页码:15993 / 15998
页数:6
相关论文
共 33 条
[21]   MOLECULAR-BEAM EPITAXY OF METASTABLE, DIAMOND STRUCTURE SNX GE1-X ALLOYS [J].
PUKITE, PR ;
HARWIT, A ;
IYER, SS .
APPLIED PHYSICS LETTERS, 1989, 54 (21) :2142-2144
[22]   Raman scattering from fully strained Ge1-xSnx (x≤0.22) alloys grown on Ge(001)2x1 by low-temperature molecular beam epitaxy [J].
Rojas-Lopez, M ;
Navarro-Contreras, H ;
Desjardins, P ;
Gurdal, O ;
Taylor, N ;
Carlsson, JRA ;
Greene, JE .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (04) :2219-2223
[23]   ON THE STABILITY OF SURFACES OF STRESSED SOLIDS [J].
SROLOVITZ, DJ .
ACTA METALLURGICA, 1989, 37 (02) :621-625
[24]   COMPETING RELAXATION MECHANISMS IN STRAINED LAYERS [J].
TERSOFF, J ;
LEGOUES, FK .
PHYSICAL REVIEW LETTERS, 1994, 72 (22) :3570-3573
[25]  
Tu K.-N., 1992, ELECT THIN FILM SCI
[26]   Low-temperature growth morphology of singular and vicinal Ge(001) [J].
Van Nostrand, JE ;
Chey, SJ ;
Cahill, DG .
PHYSICAL REVIEW B, 1998, 57 (19) :12536-12543
[27]   SURFACE-MORPHOLOGY DURING MULTILAYER EPITAXIAL-GROWTH OF GE(001) [J].
VANNOSTRAND, JE ;
CHEY, SJ ;
HASAN, MA ;
CAHILL, DG ;
GREENE, JE .
PHYSICAL REVIEW LETTERS, 1995, 74 (07) :1127-1130
[28]  
VANNOSTRAND JE, 1996, THESIS U ILLINOIS UR
[29]   ADATOM MOTION TO LATTICE STEPS - A DIRECT VIEW [J].
WANG, SC ;
EHRLICH, G .
PHYSICAL REVIEW LETTERS, 1993, 70 (01) :41-44
[30]  
WESCHEIDER W, 1992, J CRYST GROWTH, V123, P75