Amorphous silicon sensor arrays for X-ray and document imaging

被引：13

作者：

Street, RA ^{[1
]}

Weisfield, RL ^{[1
]}

Apte, RB ^{[1
]}

Ready, SE ^{[1
]}

Moore, A ^{[1
]}

Nguyen, M ^{[1
]}

Jackson, WB ^{[1
]}

Nylen, P ^{[1
]}

机构：

[1] DPIX,PALO ALTO,CA 94304

来源：

THIN SOLID FILMS | 1997年 / 296卷 / 1-2期

基金：

美国国家卫生研究院;

关键词：

sensor arrays; X-ray imaging; document imaging;

D O I：

10.1016/S0040-6090(96)09340-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Amorphous silicon image sensor arrays are being developed for X-ray imaging and document scanning. The arrays have a two-dimensional structure with each pixel containing a sensor and a TFT, both fabricated with a-Si:H by photolithography on 12 x 13 '' glass substrates. The design and characteristics of a recent complete X-ray imaging system is described. Measurements show that the sensor can detect a photocurrent as low as 1 fA, with imager integration times up to 250 s. These results are largely determined by the sensor and TFT leakage currents. New information about the TFT transient off-current is obtained. (C) 1997 Elsevier Science S.A.

引用

页码：172 / 176

页数：5

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