The influence of metastable atoms and the effect of the nonlocal character of the electron distribution on the characteristics of the positive column in an argon discharge

被引:26
作者
Bogdanov, EA [1 ]
Kudryavtsev, AA
Tsendin, LD
Arslanbekov, RR
Kolobov, VI
Kudryavtsev, VV
机构
[1] St Petersburg State Univ, St Petersburg 198504, Russia
[2] St Petersburg State Polytech Univ, St Petersburg 195251, Russia
[3] CFDRC, Huntsville, AL USA
[4] CFD Canada, Toronto, ON, Canada
基金
俄罗斯基础研究基金会;
关键词
D O I
10.1134/1.1767877
中图分类号
O59 [应用物理学];
学科分类号
摘要
Commercial CFDRC software (http://www.cfdrc.com/similar tocfdplasma) is used to self-consistently simulate the plasma of the positive column (PC) of a dc discharge in argon. The software allows simulations in an arbitrary 3D geometry by using Poisson's equation for the electric potential and fluid equations for the heavy components and by solving a nonlocal kinetic equation for electrons. It is shown that, in calculating the electron distribution function, the local approximation is almost always inapplicable under real conditions of a diffuse PC usually met in practice (pR < (5-10) cm Torr). The influence of metastable atoms, which can substantially affect the parameters of the PC plasma, is considered. It is shown that superelasic collisions play an important role in enriching the fast component of the electron distribution function and that the Penning ionization can result in an ascending volt-ampere characteristic of the positive column. (C) 2004 MAIK "Nauka/Interperiodica".
引用
收藏
页码:698 / 706
页数:9
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