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Raman spectra of ion beam sputtered amorphous carbon thin films deposited from camphoric carbon

被引：74
作者：
Mominuzzaman, SM
Krishna, KM
Soga, T
Jimbo, T
Umeno, M
机构：
[1] Nagoya Inst Technol, Dept Elect & Comp Engn, Showa Ku, Nagoya, Aichi 4668555, Japan
[2] Nagoya Inst Technol, Res Ctr Microstruct Devices, Showa Ku, Nagoya, Aichi 4668555, Japan
[3] Nagoya Inst Technol, Dept Environm Technol & Urban Planning, Showa Ku, Nagoya, Aichi 4668555, Japan
来源：
CARBON | 2000年 / 38卷 / 01期
基金：
日本学术振兴会;
关键词：
amorphous carbon; carbon precursor; heat treatment; Raman spectroscopy; crystallite size;
D O I：
10.1016/S0008-6223(99)00107-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Thin films of carbon were deposited on single crystal silicon and quartz substrates by simple ion beam sputtering of camphoric cal bon target, obtained from camphor: a natural source, at room temperature. The as-deposited films were heat treated at different temperatures and the effects of heat treatment on structural modifications were studied in detail by Raman spectroscopy through the evolution of D and G bands. The spectral evolution observed on heat treated samples show progressive formation of crystallites. These structural changes were further correlated with optical gap and fraction of sp(3) bonded carbons present, derived respectively from uv-visible and photoelectron spectroscopies, and the results obtained are discussed and compared with the literature. (C) 1999 Elsevier Science Ltd, All rights reserved.
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收藏
页码：127 / 131
页数：5
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