Mixed-sputter deposition of Ni-Ti-Cu shape memory films

被引：87

作者：

Krulevitch, P ^{[1
]}

Ramsey, PB ^{[1
]}

Makowiecki, DM ^{[1
]}

Lee, AP ^{[1
]}

Northrup, MA ^{[1
]}

Johnson, GC ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT MECH ENGN,BERKELEY,CA 94720

来源：

THIN SOLID FILMS | 1996年 / 274卷 / 1-2期

基金：

美国国家科学基金会;

关键词：

alloys; sputtering; stress; transmission electron microscopy;

D O I：

10.1016/0040-6090(95)07072-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ni-Ti-Cu shape memory films were mixed-sputter deposited from separate nickel, titanium, and copper targets, providing increased compositional flexibility. Shape memory characteristics, examined for films with 7 at.% Cu and 41-51 at.% Ti, were determined with temperature-controlled substrate-curvature measurements, and the microstructure was studied with transmission electron microscopy. The Ni-Ti-Cu films were found to have shape memory properties comparable with bulk materials, with transformation temperatures between 20 and 62 degrees C, a 10-13 degrees C hysteresis, and up to 330 MPa recoverable stress.

引用

页码：101 / 105

页数：5

共 29 条

[1]

BERKSON MH, 1990, THESIS U CALIFORNIA

[2] CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J].

BRANTLEY, WA .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) :534-535

[3] STRUCTURE OF NITICU SHAPE MEMORY ALLOYS [J].

BRICKNELL, RH ;

MELTON, KN ;

MERCIER, O .

METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1979, 10 (06) :693-697

[4] SHAPE-MEMORY PROPERTIES IN NI-TI SPUTTER-DEPOSITED FILM [J].

BUSCH, JD ;

JOHNSON, AD ;

LEE, CH ;

STEVENSON, DA .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (12) :6224-6228

[5]

CHANG L, 1990, MATER RES SOC SYMP P, V187, P137, DOI 10.1557/PROC-187-137

[6]

CHANG L, 1992, MATER RES SOC SYMP P, V246, P141

[7] ELEVATION OF PREMARTENSITIC TRANSFORMATION TEMPERATURE BY (NI+CU)2TI PRECIPITATION IN SPUTTERED NI(1-X)TICU(X) THIN-FILMS [J].

CHANG, L ;

GRUMMON, DS .

SCRIPTA METALLURGICA ET MATERIALIA, 1991, 25 (09) :2079-2084

[8]

Duerig T.W., 2013, Engineering aspects of shape memory alloys, V1st ed.

[9]

DUERIG TW, 1990, ENG ASPECTS SHAPE ME, P3

[10]

Funakubo H., 1984, SHAPE MEMORY ALLOYS

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