Preparation and pyroelectric properties of (Pb, La)(Zr, Ti)O-3 (PLZT) thin films

被引：14

作者：

Kobune, M ^{[1
]}

Fujii, S ^{[1
]}

Takayama, R ^{[1
]}

Tomozawa, A ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,HUMAN ENVIRONM RES LAB,SEIKA,KYOTO FU 61902,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 9B期

关键词：

PLZT thin film; pyroelectric property; intermittent deposition; infrared sensor; ferroelectrics; figure of merit;

D O I：

10.1143/JJAP.35.4980

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

PLZT films around 3 mu m thick with compositions of ((Pb0.925La0.075)(ZryTi1-y)(0.981) + 0.5 mass%MnO2) where y = 0-0.10, which have an appropriately small relative dielectric constant (similar to 200) were deposited on Pt(100)/MgO(100) by rf magnetron sputtering. The pyroelectric properties of PLZT films as element materials for pyroelectric IR sensors were investigated in detail. Assuming that the volume specific heat C-v of the present films is 3.2 J/cm(3) . K the PLZT films exhibited the highest F.M. of 1.4 x 10(-10) C . cm/J and F.M.D* of 1.0 x 10(-8) C . cm/J, which were around 1.8 times and 1.5 times larger than those of PLT films, respectively Consequently, the figures of merit for the pyroelectric IR sensors could be improved by adding a small amount of Zr to PLT.

引用

页码：4980 / 4983

页数：4

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