Calorimetric measurements with a heat flux transducer of the total power influx onto a substrate during magnetron sputtering

A sensor, first described by Garden [R. Garden, Rev. Sci. Instrum., 24 (1953) 366] for the measurement of hear fluxes, is used for the measurement of the total power flux to a substrate during magnetron sputtering. The signal of this calorimetric sensor is directly proportional to the total power influx. The advantages are a fast response time (<<ls) and its ruggedness. For a series of metals (Al, Cu, Mo, Ti, W) and for different sputtering sources, the power and pressure dependence of the power influx has been determined with such a sensor. The total power influx during magnetron sputtering of metals is directly proportional to the discharge power. The power influx depends on the design of the sputtering source (balanced or unbalanced) and is in the order of 25 mW cm(-2) at a d.c.-discharge power of 100 W for a balanced magnetron. Unbalanced magnetrons exhibit much higher power fluxes to a substrate (>150 mW cm(-2)). (C) 1999 Elsevier Science S.A. All rights reserved.