SUBSTRATE HEATING IN CYLINDRICAL MAGNETRON SPUTTERING SOURCES

被引：183

作者：

THORNTON, JA

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(78)90273-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：23 / 31

页数：9

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