共 10 条
[1]
ANALYSIS OF OFFGASSED WATER - CALIBRATION AND TECHNIQUES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (04)
:1778-1781
[2]
OUTGASSING BEHAVIOR OF A6063-EX ALUMINUM-ALLOY AND SUS-304 STAINLESS-STEEL
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (06)
:3422-3424
[3]
OUTGASSING BEHAVIOR ON ALUMINUM SURFACES - WATER IN VACUUM-SYSTEMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (04)
:1750-1754
[5]
CHEN JR, 1989, J VAC SOC ROC, V2, P20
[6]
LI M, 1993, J VAC SCI TECHNOL A, V11, P1720
[7]
REDUCTION OF OUTGASSING RATE BY GLOW-DISCHARGE CLEANING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1995, 13 (03)
:571-575
[8]
MODEL FOR WATER OUTGASSING FROM METAL-SURFACES .2.
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (04)
:1772-1777
[10]
QUICK ACQUISITION OF CLEAN ULTRAHIGH-VACUUM BY CHEMICAL PROCESS TECHNOLOGY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1993, 11 (04)
:1719-1724