THERMAL OUTGASSING STUDY ON ALUMINUM SURFACES

被引:5
作者
LIU, YC
HUANG, JR
WU, CY
CHEN, JR
机构
[1] SYNCHROTRON RADIAT RES CTR,HSINCHU 30077,TAIWAN
[2] NATL TSING HUA UNIV,INST NUCL SCI,HSINCHU 30043,TAIWAN
关键词
D O I
10.1016/0042-207X(93)90066-J
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thermal outgassing rates of aluminum chambers vented to nitrogen atmospheres with different humidity were measured. Both desorption and diffusion phenomena were observed in the outgassing rate curves, the lower the humidity the clearer the diffusion effect. The build-up curves of water vapor were compared for different ventings, the build-up rate being insignificant for the case of venting with dryer nitrogen gas. An adsorption and desorption process of water molecules on aluminum surfaces is described and discussed.
引用
收藏
页码:435 / 437
页数:3
相关论文
共 8 条
[1]  
BE SH, 1991, AIP CONF PROC, V236, P102
[2]   OUTGASSING BEHAVIOR OF A6063-EX ALUMINUM-ALLOY AND SUS-304 STAINLESS-STEEL [J].
CHEN, JR ;
LEE, CH ;
CHEN, JC ;
HSIEH, HL ;
LIU, YC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (06) :3422-3424
[3]   THERMAL OUTGASSING FROM ALUMINUM-ALLOY VACUUM CHAMBERS [J].
CHEN, JR ;
NARUSHIMA, K ;
ISHIMARU, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2188-2191
[4]   A COMPARISON OF OUTGASSING RATE OF 304 STAINLESS-STEEL AND A6063-EX ALUMINUM-ALLOY VACUUM CHAMBER AFTER FILLING WITH WATER [J].
CHEN, JR ;
LIU, YC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (02) :262-264
[5]  
CHEN JR, 1989, J VAC SOC ROC, V2, P20
[6]  
GOEPPNER GA, 1991, AM I PHYSICS C P, V236, P84
[7]   ALL-ALUMINUM-ALLOY ULTRAHIGH-VACUUM SYSTEM FOR A LARGE-SCALE ELECTRON POSITRON COLLIDER [J].
ISHIMARU, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :1170-1175
[8]  
1990, VACUUM, V41, P1882