Additive fabrication of integrated ferroelectric thin-film capacitors using self-assembled organic thin-film templates

The utility of non-lithographic patterning methods for the integrated fabrication of prototypical thin-film-device architectures is demonstrated. An additive patterning technique based on printed organic thin films is used to fabricate ferroelectric capacitors consisting of a Pt/PZT/Pt thin-film structure, where PZT is lead zirconium titanate. This type of material, which has applications in high performance information storage, micromachine, and thermal imaging devices, cannot be created using the conventional fine-scale patterning methods.