Spectroellipsometric evaluation of colour and oxidation resistance of TiMgN coatings

被引：20

作者：

Banakh, O

Balzer, M

Fenker, M

Blatter, A

机构：

[1] Univ Appl Sci, EIAJ, Dept Microtechnol, CH-2400 Le Locle, Switzerland

[2] Res Inst Precious Met & Met Chem, D-73525 Schwabisch Gmund, Germany

[3] PX Tech SA, CH-2403 La Chaux De Fonds, Switzerland

来源：

THIN SOLID FILMS | 2004年 / 455卷

关键词：

titanium nitride; magnesium; coatings; heat treatment;

D O I：

10.1016/j.tsf.2003.11.218

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

New TiMgN decorative coatings were deposited by reactive magnetron sputtering on high speed steel substrates. Their optical properties and oxidation resistance were evaluated by spectroscopic ellipsometry. Increasing Mg content in TiMgN reduces the free electron concentration and hence lowers the plasma frequency. The related red-shift of the reflectivity edge in the visible spectrum gives rise to changing colours, from yellow through violet to grey. The oxidation resistance was evaluated by heating the samples in air at 400 degreesC for 14 h. The oxidation kinetics of the coatings was studied by measuring the change in ellipsometric angles Psi and Delta with oxidation time. It turns out that the Mg addition significantly improves the coating stability as compared to TiN. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：650 / 655

页数：6

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