MORPHOLOGY AND PROPERTIES OF SPUTTERED (TI,AL)N LAYERS ON HIGH-SPEED STEEL SUBSTRATES AS A FUNCTION OF DEPOSITION TEMPERATURE AND SPUTTERING ATMOSPHERE

被引：149

作者：

JEHN, HA ^{[1
]}

HOFMANN, S ^{[1
]}

RUCKBORN, VE ^{[1
]}

MUNZ, WD ^{[1
]}

机构：

[1] LEYBOLD HERAEUS GMBH,D-6450 HANAU,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573709

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2701 / 2705

页数：5

共 24 条

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[9] MORPHOLOGY AND PROPERTIES OF SPUTTERED HFN LAYERS AS A FUNCTION OF SUBSTRATE-TEMPERATURE AND SPUTTERING ATMOSPHERE [J].

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