MORPHOLOGY AND PROPERTIES OF SPUTTERED HFN LAYERS AS A FUNCTION OF SUBSTRATE-TEMPERATURE AND SPUTTERING ATMOSPHERE

被引：20

作者：

JEHN, HA

KOPACZ, U

HOFMANN, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.572847

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2406 / 2410

页数：5

共 20 条

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