Evolution with light-soaking of polymorphous material prepared at 423 K

被引:9
作者
Roy, D
Longeaud, C
Saadane, O
Gueunier, ME
Vignoli, S
Butté, R
Meaudre, R
Meaudre, M
机构
[1] Univ Paris 06, Lab Genie Elect Paris, UMR 8507 CNRS, Supelec, F-91190 Gif Sur Yvette, France
[2] Univ Lyon 1, UMR 5586 CNRS, Dept Phys Mat, F-69622 Villeurbanne, France
关键词
D O I
10.1016/S0022-3093(01)01020-1
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have studied the density of states and the structural properties of a new class of material. called hydrogenated polymorphous silicon, prepared by decomposition of a mixture of silane and hydrogen in a radio frequency powered plasma enhanced chemical vapour deposition system. The evolution of the density of states and of the optoelectronic properties of these films upon light-soaking and annealing cycles is different from that observed on standard hydrogenated amorphous silicon. The presence of platelet-like microstructures. revealed by an infrared absorption band centred at 2030 cm(-1). may explain this evolution, (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:482 / 486
页数:5
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