Thermal decay of silicon islands and craters on silicon surfaces by scanning tunneling microscopy

被引:16
作者
Tanaka, Y [1 ]
Ishiyama, K [1 ]
Ichimiya, A [1 ]
机构
[1] TOYOTA CENT RES & DEV LABS INC, AICHI 48011, JAPAN
关键词
D O I
10.1016/0039-6028(96)00274-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thermal decomposition processes of isolated silicon islands and filling-up processes of isolated craters on Si(111)7 x 7 surfaces are observed at various temperatures. By Arrhenius plots of rates of these size charges, activation energies for island decomposition and crater filling-up on the Si(111) surface are determined as (1.5 +/- 0.1) and (1.3 +/- 0.2) eV, respectively. Pre-exponential factors are 2.1 x 10(11 +/- 1) and 2.6 x 10(9 +/- 2) s(-1) for the islands and craters on the Si(111) respectively. On the Si(111) surface the rates for island decomposition are five times larger than those of craters filling up. We discuss the results with two-dimensional vapor phase processes and the Schwoebel effect.
引用
收藏
页码:840 / 843
页数:4
相关论文
共 7 条
  • [1] RESTORATION PROCESS OF A CRATER ON A METAL-SURFACE
    BABA, M
    NATORI, A
    YASUNAGA, H
    [J]. SURFACE SCIENCE, 1990, 239 (03) : 363 - 373
  • [2] BROWNIAN-MOTION OF STEPS ON SI(111)
    BARTELT, NC
    GOLDBERG, JL
    EINSTEIN, TL
    WILLIAMS, ED
    HEYRAUD, JC
    METOIS, JJ
    [J]. PHYSICAL REVIEW B, 1993, 48 (20): : 15453 - 15456
  • [3] OBSERVATION OF SURFACE RECONSTRUCTION ON SILICON ABOVE 800-DEGREES-C USING THE STM
    KITAMURA, S
    SATO, T
    IWATSUKI, M
    [J]. NATURE, 1991, 351 (6323) : 215 - 217
  • [4] STEP MOTION ON CRYSTAL SURFACES .2.
    SCHWOEBEL, RL
    [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (02) : 614 - +
  • [5] SWARTZENTRUBER BS, 1993, PHYS REV B, V47, P13422
  • [6] VOIGTLANDER B, 1993, SURF SCI, V292, pL775, DOI 10.1016/0039-6028(93)90377-V
  • [7] YAGI K, 1982, SCANNING ELECTRON MI, V4, P1421