Parameter extraction of resistive thermal sensors

Obtaining thermal parameters is important in evaluating the performance of thermal microsensors. Two experimental methods are described here for the study of the pressure-dependent thermal behavior of the sensors: a bolometric method that utilizes a chopped light input to obtain a sensor frequency response, and deriving its thermal data therefrom; a d.c, electrical method that measures the heat required for balance under d.c. bias, and obtaining sensor information. The thermal conductance and capacitance, absorptance, as well as emissivity of a sensor can be extracted from the experimental measurements. These parameters provide the essential data for the electrothermal SPICE program in the related design simulations.