Structural properties of fluorinated amorphous carbon films

被引：70

作者：

Wang, X

Harris, HR

Bouldin, K

Temkin, H

Gangopadhyay, S ^{[1
]}

Strathman, MD

West, M

机构：

[1] Texas Tech Univ, Dept Phys & Elect Engn, Lubbock, TX 79409 USA

[2] Thin Film Anal Inc, Sunnyvale, CA 94086 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2000年 / 87卷 / 01期

关键词：

D O I：

10.1063/1.371910

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm(-1) were resolved into ten peaks, which were assigned to various carbon-fluorine and carbon-carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp(2)) concentration is demonstrated. (C) 2000 American Institute of Physics. [S0021-8979(00)00101-8].

引用

页码：621 / 623

页数：3

共 8 条

[1]

Colthup N.B., 1964, INTRO INFRARED RAMAN

[2] INVESTIGATIONS OF STRUCTURE OF THIN FLUOROCARBON FILMS BY X-RAY DIFFRACTION AND INFRARED SPECTROSCOPY [J].