Bending of a rectangular cantilever of an atomic force microscope as a function of position along length

被引：5

作者：

Miyatani, T ^{[1
]}

Fujihira, M ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT BIOMOL ENGN,MIDORI KU,YOKOHAMA,KANAGAWA 226,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 08期

关键词：

atomic force microscope; surface stress; bending of a microcantilever; concentrated load; bending moment;

D O I：

10.1143/JJAP.36.5280

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In order to measure quantitatively the surface stress change of a cantilever for an atomic force microscope, we studied the bending of a rectangular cantilever pushed ca. 50 nm against a hard surface as a function of the laser spot position on the cantilever and compared the result with the bending caused by the surface stress change.

引用

页码：5280 / 5281

页数：2

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