Increase of efficiency for the XeCl excimer laser ablation of ceramics

被引：37

作者：

Geiger, M

Becker, W

Rebhan, T

Hutfless, J

Lutz, N

机构：

[1] UNIV ERLANGEN NURNBERG,CHAIR MFG TECHNOL,D-91058 ERLANGEN,GERMANY

[2] BLZ,BAVARIAN LASER CTR,D-91058 ERLANGEN,GERMANY

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

D O I：

10.1016/0169-4332(95)00435-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The efficiency of XeCl excimer laser ablation of ceramics was increased by one order of magnitude due to special processing conditions. Increasing either the temperature of the material beyond 1000 degrees C or using a water film on the workpiece surface enables ablation rates of more than 2 mu m/pulse for Al2O3. The interaction phenomena are studied using process diagnostics.

引用

页码：309 / 315

页数：7