Tunable dielectric properties of lead barium zirconate niobate films

被引：23

作者：

Kuo, Ya-Ling ^{[1
]}

Wu, Jenn-Ming ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 13期

关键词：

D O I：

10.1063/1.2357851

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of substitution of niobium for zirconium on tunable behavior of lead barium zirconate (PBZ) films was investigated. Lead barium zirconate niobate films were grown on Pt/Ti/SiO2/Si substrates using chemical solution deposition method. The substitution of Nb for Zr enhances tunable properties of PBZ films. The dielectric tunabilities are excellent, all higher than 45% with a maximum=60%. The substitution of Nb for Zr raises values of figure of merit (FOM) of films. The maximum FOM takes place at 5 mol % Nb with a value of 90, which is about three times that of the corresponding PBZ film. (c) 2006 American Institute of Physics.

引用

页数：3

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