Characteristics of some (MOD) thin film layer type compounds in the bismuth titanate lead titanate system

被引:4
作者
Micheli, AL
Mantese, JV
Schubring, NW
机构
[1] Gen. Motors R. and D. Center, Elec. and Electronics Department, Warren
关键词
D O I
10.1080/10584589608225743
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Layer type Aurivillius compounds of complex ferroelectric bismuth oxides have become important as thin films for nonvolatile, random-access memories(DRAMS). This paper reports the investigation of the formation of these compounds and their electrical properties, in the bismuth titanate-lead titanate system. Films were formed using the metallo-organic decomposition (MOD) spin-on solution process. These solutions were spun onto a platinized Si substrate and then fired at 700 degrees C to form 1 mu m thick films of bismuth titanate and lead titanate, The films were analyzed using microprobe and x-ray diffraction analyses. Next, the solutions were blended to give compounds from m = 4 to m = 7; where m is defined as the potential number of perovskite-like units between (Bi2O2)(+2) layers. The blended solutions were processed exactly like the bismuth titanate and lead titanate solutions. X-ray diffraction analysis was used to determine if Aurivillius layer compounds were formed. Ferroelectric hysteresis loops were correlated with the results obtained from the x-ray diffraction studies.
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页码:1 / 9
页数:9
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