Pulsed-laser deposited ZnO for device applications

被引：89

作者：

King, SL ^{[1
]}

Gardeniers, JGE ^{[1
]}

Boyd, IW ^{[1
]}

机构：

[1] UNIV TWENTE, DEPT ELECT ENGN, MESA RES INST, 7500 AE ENSCHEDE, NETHERLANDS

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1016/0169-4332(96)80027-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2 degrees and (002) 2 theta peak FWHM (corrected) of 0.085 degrees. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.

引用

页码：811 / 818

页数：8

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