CHARACTERIZATION OF PULSED LASER DEPOSITED ZINC-OXIDE

被引：72

作者：

IANNO, NJ ^{[1
]}

MCCONVILLE, L ^{[1
]}

SHAIKH, N ^{[1
]}

PITTAL, S ^{[1
]}

SNYDER, PG ^{[1
]}

机构：

[1] UNIV NEBRASKA,DEPT ENGN & MECH,LINCOLN,NE 68588

来源：

THIN SOLID FILMS | 1992年 / 220卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90554-O

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The pulsed laser deposition of zinc oxide films (ZnO) has been studied as a function of laser wavelength, and substrate temperature. Optical emission spectroscopy of the laser produced plume was used to characterize the deposition process. The deposited films were characterized by X-ray diffractometry, Auger electron spectroscopy, and scanning electron microscopy. Highly textured (002) ZnO films deposited at substrate temperatures of 300-degrees-C with laser wavelengths of 532 nm and 248 nm. However, the energy fluence of 248 nm radiation controls the degree of texturing, allowing highly textured films to be deposited at room temperature.

引用

页码：92 / 99

页数：8

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