PREFERRED ORIENTATION OF ZNO FILMS CONTROLLED BY RF SPUTTERING

被引：20

作者：

MURTI, DK

BLUHM, TL

机构：

来源：

THIN SOLID FILMS | 1982年 / 87卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90571-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：57 / 61

页数：5

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