Oxidation and ablation of polymers by vacuum UV radiation from low pressure plasmas

被引:67
作者
Fozza, AC
Roch, J
KlembergSapieha, JE
Kruse, A
Hollander, A
Wertheimer, MR
机构
[1] ECOLE POLYTECH,COUCHES MINCES GRP,MONTREAL,PQ HC3 3A7,CANADA
[2] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL,PQ HC3 3A7,CANADA
[3] FRAUNHOFER INST ANGEW MAT FORSCH,D-28717 BREMEN,GERMANY
[4] FRAUNHOFER INST APPL POLYMER RES,D-14513 TELTOW,GERMANY
基金
加拿大自然科学与工程研究理事会;
关键词
low pressure plasmas; vacuum-ultraviolet; polymer oxidation;
D O I
10.1016/S0168-583X(97)00154-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Low-pressure glow discharge plasmas are increasingly used as an effective method for the surface modification of polymers; they can also serve in the laboratory to simulate low Earth orbital environment (LEG). Although Vacuum-Ultraviolet (VUV, lambda < 200 nm) is an important component of plasma environment, only few studies have focused on its effects so far. The emission from low-pressure microwave plasma in the VUV-UV regions was investigated in order to use this plasma as light sources for the study of the VUV/UV effects on various polymers (polyethylene, polymethylmelhacrylate, etc.) or high molecular weight oligomers (hexatriacontane). We have employed a quartz crystal microbalance (QCM) in order to measure in situ the net mass change of the polymeric films exposed to VUV/UV radiation originating from hydrogen plasmas. Measurements were made with the specimens in vacuum, or immersed in low-pressure oxygen, directly exposed to the VUV/UV (perpendicular to the radiation flux), or only to the VUV-generated atomic oxygen, AO (parallel to the radiation flux). Following irradiation, samples were analysed by X-ray Photoelectron Spectroscopy (XPS), in order to study the evolution of the oxygen content and of the various functional groups.
引用
收藏
页码:205 / 210
页数:6
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