Below-surface behavior of hydrogen studied by nuclear reaction analysis

被引：45

作者：

Fukutani, K ^{[1
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan

来源：

CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE | 2002年 / 6卷 / 02期

关键词：

surface; subsurface; interface; hydrogen; nuclear reaction analysis;

D O I：

10.1016/S1359-0286(02)00039-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The behavior of hydrogen in the near-surface region can be investigated by a nuclear reaction analysis (NRA) technique. The H atom adsorbed on a surface might penetrate the surface and in-diffuse toward the bulk. During metal-semiconductor interface formation, H might be trapped at the interface or out-diffuse toward the surface of the overlayer. The NRA method combined with surface science techniques provides insight into the 'below-surface' behavior of H on a nanometer scale. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：153 / 161

页数：9

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