Isotropic incoherent scanning tunneling optical microscope (I2 STOM)

被引：4

作者：

Vannier, C ^{[1
]}

Bainier, C ^{[1
]}

Courjon, D ^{[1
]}

机构：

[1] Univ Franche Comte, Inst Microtech Franche Comte, Lab Opt PM Duffieux, CNRS,UMR 6603, F-25030 Besancon, France

来源：

OPTICS COMMUNICATIONS | 2000年 / 175卷 / 1-3期

关键词：

near-field optics; scanning tunneling optical microscopy; optical device; optical confinement; test-object;

D O I：

10.1016/S0030-4018(00)00450-8

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A symmetric illumination device for scanning tunneling optical microscopy is proposed. This new configuration limits the spurious effects due to non isotropic illumination, coherence and polarization effects. Some specific test objects have been fabricated in order to estimate the validity of such a microscope. Experimental results exhibiting highly confined features for a 15 nm chromium layer with 130-150 nm diameter holes have been obtained. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

引用

页码：83 / 88

页数：6

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