Digital Holography for characterization and testing of MEMS structures

被引：28

作者：

Ferraro, P ^{[1
]}

Coppola, G ^{[1
]}

De Nicola, S ^{[1
]}

Finizio, A ^{[1
]}

Grilli, S ^{[1
]}

Iodice, M ^{[1
]}

Magro, C ^{[1
]}

Pierattini, G ^{[1
]}

机构：

[1] CNR, Ist Cibernet, I-80078 Pozzuoli, NA, Italy

来源：

2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年

关键词：

D O I：

10.1109/OMEMS.2002.1031475

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Digital holography is proposed as non-contact method for inspection and characterization of MEMS. The method can be useful for assessing the fabrication process and the functionality as well as the reliability of micro machined structures.

引用

页码：125 / 126

页数：2

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