High-Contrast Grating VCSELs

被引：80

作者：

Chang-Hasnain, Connie J. ^{[1
]}

Zhou, Ye ^{[1
]}

Huang, Michael C. Y. ^{[1
]}

Chase, Christopher ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2009年 / 15卷 / 03期

关键词：

High-contrast subwavelength grating; optical MEMS; optical communication; vertical-cavity surface-emitting laser (VCSEL); VERTICAL-CAVITY LASERS; SURFACE-EMITTING LASERS; TUNABLE VCSEL;

D O I：

10.1109/JSTQE.2009.2015195

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recent advances in a single-layer 1-D high-index-contrast subwavelength grating structure are reviewed. Its incorporation into a vertical-cavity surface-emitting laser (VCSEL) structure enabled simple fabrication, lithographically defined polarization control and large aperture, single-transverse-mode control. Extraordinarily large fabrication tolerance is demonstrated with 20% variation of the high-contrast grating (HCG) critical dimension. Emission wavelength of HCG-VCSEL varied 0.2% with a 40% change in lithography linewidth. Tunable VCSELs are fabricated using HCG, which led to a 8000 times reduction in the tunable mirror size and 160 times improved tuning speed of 63 ns. This configuration will open the door for a wide spectrum of optoelectronic devices in large wavelength regimes.

引用

页码：869 / 878

页数：10

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