Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display

被引：16

作者：

Lo, Cheng-Yao ^{[1
]}

Kiitola-Keinanen, Johanna ^{[2
]}

Huttunen, Olli-Heikki ^{[2
]}

Petaja, Jarno ^{[2
]}

Hast, Jukka ^{[2
]}

Maaninen, Arto ^{[2
]}

Kopola, Harri ^{[2
]}

Fujita, Hiroyuki ^{[1
]}

Toshiyoshi, Hiroshi ^{[1
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan

[2] VTT Tech Res Ctr Finland, Oulu 90571, Finland

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2009年 / 48卷 / 06期

关键词：

PRINTING TECHNOLOGY; POLYPROPYLENE;

D O I：

10.1143/JJAP.48.06FC04

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 mu m display pixels by using the concept of micro electro mechanical system (MEMS) Fabry-Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 mu m resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques. (C) 2009 The Japan Society of Applied Physics

引用

页码：06FC041 / 06FC045

页数：5

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