Back surface reflectors with periodic textures fabricated by self-ordering process for light trapping in thin-film microcrystalline silicon solar cells

Back surface reflectors (BSRs) with grating structures have been developed to enhance light trapping in thin-film hydrogenated microcrystalline Si (mu c-Si:H) solar cells. As a grating structure, a periodic honeycomb-like dimple pattern with a period of similar to 450 nm has been fabricated on Al substrates by a self-ordering process using anodic oxidation of Al. The clear diffraction effect has been confirmed on the patterned Al from the angle-dependent reflection. From quantum efficiency measurements, we found that the periodically patterned BSR can confine the incident light more effectively than the random textured BSR, especially at longer wavelengths. (C) 2009 Elsevier B.V. All rights reserved.