Carbon dust formation in a cold plasma from cathode sputtering

被引：19

作者：

Arnas, C. ^{[1
]}

Mouberi, A. ^{[1
]}

Hassouni, K. ^{[2
]}

Michau, A. ^{[2
]}

Lombardi, G. ^{[2
]}

Bonnin, X. ^{[2
]}

Benedic, F. ^{[2
]}

Pegourie, B. ^{[3
]}

机构：

[1] Univ Aix Marseille 1, Fac Sci St Jerome, Lab Phys Interact Ion & Mol, F-13397 Marseille 20, France

[2] Univ Paris 13, LIMHP, F-93430 Villetaneuse, France

[3] CEA DSM IRFM, CEA Cadarache, Assoc Euratom CEA, F-13108 St Paul Les Durance, France

来源：

JOURNAL OF NUCLEAR MATERIALS | 2009年 / 390-91卷

关键词：

AR/H-2/CH4 MICROWAVE DISCHARGES; PARTICULATE; KINETICS; TEXTOR; SIZE; GLOW;

D O I：

10.1016/j.jnucmat.2009.01.148

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanoparticles are produced in argon glow plasmas where carbon is introduced by sputtering of a graphite cathode. A scaling law of growth is reported on as a function of the discharge time. Two successive stages of growth of concomitant agglomeration and carbon deposition are observed, followed by a final stage of growth by carbon deposition. A model of formation of molecular precursors by coagulation of neutral clusters on the one hand and of neutral-negative clusters on the other hand is presented, based on formation enthalpy and cluster geometry. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：140 / 143

页数：4

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