'nano-rods' of single crystalline diamond

被引：77

作者：

Ando, Y

Nishibayashi, Y

Sawabe, A

机构：

[1] Aoyama Gakuin Univ, Coll Sci & Engn, Dept Elect Engn & Elect, Sagamihara, Kanagawa 2298558, Japan

[2] Sumitomo Elect Ind Ltd, Adv Mat R&D Labs, Itami, Hyogo 6640016, Japan

来源：

关键词：

reactive ion etching (RIE); microwave plasma etching; microstructure; nanostructures;

D O I：

10.1016/j.diamond.2003.10.066

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have developed a novel microfabrication method by combining a microwave plasma treatment with a reactive ion etching (RIE) method. First, the RIE system was used for fabricating whiskers of single crystalline diamond. Then, the whiskers were exposed to microwave plasma of hydrogen gas. As a result, we have successfully fabricated a nano-scale diamond rod of the single crystal, which has the crystalline facets. The sizes of the 'nano-rods' were 50-200 nm in thickness and several microns in height. Morphology of the nano-rods could be controlled by changing the crystal orientation of the diamond substrate. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：633 / 637

页数：5

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