Lithographic positioning, areal density increase and fluid transport in rolled-up nanotubes

被引:17
作者
Deneke, C [1 ]
Schmidt, OG [1 ]
机构
[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany
关键词
NEMS; real-time; video microscopy; nanofluidity;
D O I
10.1016/j.physe.2004.02.012
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We study the formation process of rolled-up InAs/GaAs nanotubes (RUNTs) as a function of etching time and sacrificial layer thickness for tube diameters between 20 and 560 nm. Within this diameter range the roll-up velocity strongly depends on the sacrificial layer thickness but is independent of the tube diameter. We also find that the roll-up distance saturates with etching time for distances around 8-16 mum. Since we define the starting edge of the roll-up process by optical lithography, we are able to position individual RUNTs on a substrate surface with reasonable accuracy. We also show that the areal density of the tubes on a surface can be doubled if a two-fold stack of strained bilayers is selectively underetched. Finally, we record organic fluid transport within a RUNT in real time and we report intense red light emission from such filled-up nanotubes. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:269 / 273
页数:5
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