BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator

被引：26

作者：

Hiltunen, Jussi

Seneviratne, Dilan

Sun, Rong

Stolfi, Michael

Tuller, Harry L.

Lappalainen, Jyrki

Lantto, Vilho

机构：

[1] Tech Res Ctr Finland, FIN-90571 Oulu, Finland

[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[3] Univ Oulu, Microelect & Mat Phys Lab, FIN-90014 Oulu, Finland

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 24期

基金：

芬兰科学院;

关键词：

D O I：

10.1063/1.2404982

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11 unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3 mm length and 13 mu m separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73 pm/V at 1550 nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field. (c) 2006 American Institute of Physics.

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页数：3

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