Fabricating narrow and trapezoidal main poles for single-pole-type heads

被引：8

作者：

Okada, T ^{[1
]}

Kimura, H ^{[1
]}

Nunokawa, I ^{[1
]}

Yoshida, N ^{[1
]}

Etoh, K ^{[1
]}

Fuyama, M ^{[1
]}

机构：

[1] Hitachi Ltd, Res & Dev Grp, Kanagawa 2568510, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2004年 / 40卷 / 04期

关键词：

etching; magnetic heads; perpendicular magnetic recording; sputtering;

D O I：

10.1109/TMAG.2004.830215

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We investigated the fabrication processes used for perpendicular recording heads. To solve the problem of side write/erase on adjacent tracks, it is necessary to develop a trapezoidal main pole for single-pole-type heads. We therefore proposed a fabrication process using ion milling and an alumina hard mask for a sputtered film. We successfully made a narrow (120-nm wide) trapezoidal main pole using the process. The beveled angle of the pole depended on both the throat height and the angle at the flare point. When the flare point angle was 90degrees, the beveled angles of the trapezoid were about 10degrees. Evaluation data confirmed that perpendicular recording heads with a trapezoidal main pole solved the side write/erase problem.

引用

页码：2329 / 2331

页数：3

共 7 条

[1] ANALYSIS FOR CIRCULAR MODE OF MAGNETIZATION IN SHORT WAVELENGTH RECORDING [J].