A high-stoke, high-pressure electrostatic actuator for valve applications

被引：51

作者：

van der Wijngaart, W ^{[1
]}

Ask, H ^{[1
]}

Enoksson, P ^{[1
]}

Stemme, G ^{[1
]}

机构：

[1] Royal Inst Technol, Microsyst Technol KTH S3, S-10044 Stockholm, Sweden

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 100卷 / 2-3期

关键词：

electrostatic; microvalve; actuator;

D O I：

10.1016/S0924-4247(02)00070-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel large-stroke electrostatic valve actuator for high-pressure applications. The combination of pressure balancing and flexible electrode structures ensures large flow gaps at a low actuation voltage. A simulation tool was built to evaluate the design parameters. Design specific, as well as general optimisations are performed. The model shows a 5.6 times (theoretical) performance improvement compared to earlier designs. A micromachined test structure was fabricated and evaluated. Measurement results are presented and discussed. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：264 / 271

页数：8

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