Tin oxide nanocrystalline films and nanowires for gas sensing applications

被引：12

作者：

Tischner, Alexandra ^{[1
]}

Koeck, Anton ^{[1
]}

Maier, Thomas ^{[1
]}

Edtmaier, Christian ^{[2
]}

Gspan, Christian ^{[3
]}

Kothleitner, Gerald ^{[3
]}

机构：

[1] Austrian Res Ctr GbmH ARC, NanoSyst Technol, A-1220 Vienna, Austria

[2] Vienna Univ Technol, Inst Chem Technol & Analyt, Vienna, Austria

[3] Graz Ctr Elect Microscopy, Graz, Austria

来源：

MICROELECTRONIC ENGINEERING | 2009年 / 86卷 / 4-6期

关键词：

Tin dioxide; Gas sensor; Nanowires; Spray pyrolysis; METAL-OXIDES; SENSORS; HUMIDITY;

D O I：

10.1016/j.mee.2008.11.084

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Supersensitive gas sensors based on nanocrystalline SnO2-films and single-crystalline SnO2-nanowires have been fabricated by spray pyrolysis. While proper mesa structuring of the nanocrystalline SnO2-films defines the sensing layers directly on the Si-wafer, the synthesis of single-crystalline SnO2-nanowires requires an additional tempering process, removal of the nanowires from their substrate and transfer, to another Si-substrate. Evaporation of metal contacts pads on both ends of single SnO2-nanowires enable their final use as gas sensing elements. Both type of sensors show a high sensitivity and are able to detect concentrations of CO and CH4 in the low ppm-regime. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：1258 / 1261

页数：4

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