Self-aligned mirror and V-grooves in free-space micromachined optical switches

被引：11

作者：

Helin, P ^{[1
]}

Mita, M ^{[1
]}

Fujita, H ^{[1
]}

机构：

[1] Univ Tokyo, LIMMS, CNRS, IIS,Minato Ku, Tokyo 106, Japan

来源：

ELECTRONICS LETTERS | 2000年 / 36卷 / 06期

关键词：

D O I：

10.1049/el:20000408

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

A new micromachining process is described that guarantees highly accurate optical alignment in the free-space optics of matrix switches. This process is demonstrated using a 2 x 2 elementary cell, which is easily scalable to a larger M x N matrix. Promising performances such as low insertion loss (0.30-0.70dB) and a fast switching time (300 mu s) are obtained.

引用

页码：563 / 564

页数：2

共 5 条

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