Soft micromolding and lamination of piezoceramic thick films

被引：21

作者：

Rosqvist, T ^{[1
]}

Johansson, S ^{[1
]}

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 97-8卷

关键词：

PZT; micromolding; PDMS; lamination; microchannels;

D O I：

10.1016/S0924-4247(02)00027-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Combining ceramic thick film technology and lithographically based microstructuring technology we have performed micromolding of PZT thick films with lateral features down to 10 mum and aspect ratios up to 7:1 using soft reusable polydimethylsiloxane (PDMS) molds replicated from SU-8 resist masters. For multilayer applications microstructured tapes were laminated using a green tape adhesive and low pressure to preserve dimensional stability. Single and multilayer bodies were fired and the resulting microstructures were studied. The presented work proves it possible to integrate channel microstructuring with multilayer ceramic technology opening up for numerous applications in areas of actuators, fluid handling components and ultrasonic transducers. Related micro structuring techniques for powderbased ceramics are compared regarding reached resolution and aspect ratio. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：512 / 519

页数：8